OVERVIEW
Vacuum or atmosphere tube furnace provide a vacuum, controlled atmosphere and high temperature experimental environment, applied in semiconductor, nanotechnology, fiber and other fields.
Vacuum or atmosphere tube furnace provide a vacuum, controlled atmosphere and high temperature experimental environment, applied in semiconductor, nanotechnology, fiber and other fields.
1. Quick connection flange structure is adopted for gas path connection, which is convenient for loading and unloading, and can be completed with only one clamp.
2. The furnace is divided into upper and lower parts. The upper part of the furnace can be turned back 1000, which is convenient for taking, placing and observing materials.
3. The furnace is made of polycrystalline mullite fiber by vacuum adsorption, with uniform temperature field and energy saving of more than 50%.
4. Independently developed air diversion heat insulation technology ensures the service life and constant temperature effect of all parts in the box.
5. Start the electric furnace, and the exhaust fan will run automatically at the same time. After the test, the exhaust fan will continue to run until the temperature of the furnace body is lower than 60 ℃, and the exhaust fan will stop automatically, effectively protecting the surface of the furnace body.
6. Automatic power-off, overtemperature protection and leakage protection when the furnace door is opened to ensure the safety of use.
7. Imported program temperature control system, 4 curves, programmable 40 segment program temperature control, touch screen is large screen, built-in 50 formulas and 50 programs, formula name can be set by users, formula can be added, deleted and transferred at will.
8. The circuit adopts continuous heating output mode, double circuit power supply, strong and weak current wiring separately, which improves the stability of the system.
9. The heating module adopts DC signal to adjust the output power, so as to avoid the interference of induction current to the control signal
10. Low pressure metal button with status indicator is selected for operation.The operation is safe and intuitive.
11. The upper and lower furnace bodies are connected by aviation plug, which is safe, reliable and convenient
12. The gas circuit assembly is made of 316 stainless steel of food grade, with corrosion resistance, atmospheric corrosion resistance, high temperature resistance, good strength and no magnetism.
Safety
Over rise alarm, menu locking, over rise prevention, power recovery delay
Model | Single zone | LTF12P50 | LTF12T50 | LTF12P60 | LTF12T60 | LTF12P80 | LTF12T80 | LTF12P100 | LTF12T100 |
Double zone | LTF12P50S | LTF12T50S | LTF12P60S | LTF12T60S | LTF12P80S | LTF12T80S | LTF12P100S | LTF12T100S | |
Performance | Temp. Range | 300~1200℃ | |||||||
Temp. Resolution | 1℃ | ||||||||
Temp. Uniformity | ±1℃ | ||||||||
Heating rate | 0-20 ℃ / min | ||||||||
heating zone | 420mm length | ||||||||
Constant temp. zone | Single zone:210 mm length /Double zone:280mm | ||||||||
Maximum vacuum | - 0.1MPa | ||||||||
Heating time of empty furnace | <15min | ||||||||
Below500℃≤5℃/min,500~800℃≤10℃/min,800-1000℃≤5℃/min,1000~1200℃≤2℃/min | |||||||||
Structure | Shell | cold rolled steel plate, surface temperature treatment | |||||||
Chamber materials | polycrystalline mullite fiber | ||||||||
Chamber size | External dimension: φ 240 * 550mm inner size: φ 120*420mm | ||||||||
Tube | quartz tube | ||||||||
Tube size | Φ50/43 *1000 | Φ50/43 *1000 | Φ60/53 *1000 | Φ60/53 *1000 | Φ80/72 *1000 | Φ80/72 *1000 | Φ100/92 *1000 | Φ100/92 *1000 | |
Thermal insulation layer | double-layer forced wind diversion | ||||||||
Heating element | Ni Cr Al alloy wire OCr27AL7Mo2 | ||||||||
Heating Power | Single zone:3kw /Double zone:3.2kw | ||||||||
Open Mode | flip back (about 100 degrees) | ||||||||
Controller | Controller | P:Imported program controlled temperature digital display T:Seven inch color touch screen program temperature control | |||||||
Control Mode | Microcomputer PID control /S type Separate temp control in double heating zone | ||||||||
Setting Mode | P: Slightly touch five buttons, digital setting mode T: Touch setting mode | ||||||||
Display Mode | P:Double row LED digital display T: Color LCD display | ||||||||
Timing | 0~999.9 hours | ||||||||
Operation Function | Set value run, program run | ||||||||
Program mode | P:Program operation, four curves, a total of 40 steps T:Maximum 50 steps, adjustable storage program | ||||||||
Sensor | K-type thermocouple | ||||||||
Auxiliary Function | P:correction function T: correction function, Real-time curve recording, U disk data export | ||||||||
Safety Device | over current and leakage protection switch | ||||||||
Specification | Dimensions | 1531*440*600(mm) | |||||||
Package size | 1120*580*945(mm) | ||||||||
Weight | 85kg | ||||||||
Power Supply | AC220V 50Hz | ||||||||
Standard Configuration | A set of gas circuit assembly (including vacuum gauge), A pair of high temperature gloves 1 quartz tube, 2 quartz plugs, 2 quartz boats, 1 hook |